Inventor

HIROSHIMA HIROSHI

JP5 patents

⚠️ This page may combine multiple inventors who share the name “HIROSHIMA HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

AGENCY IND SCIENCE TECHN

2 patents

US5493125AFeb 20, 1996

Charged beam apparatus

AGENCY IND SCIENCE TECHN21 citations88

US6065780AMay 23, 2000

Vibration-isolator joint for vacuum device

AGENCY IND SCIENCE TECHN16 citations79

AIST

2 patents

US10189203B2Jan 29, 2019

Method for forming micropattern of polyimide using imprinting

AIST2 citations71

US10562223B2Feb 18, 2020

Imprint device

AIST0 citations35

HIROSHIMA HIROSHI

1 patent

US8308961B2Nov 13, 2012

Method of producing a mold for imprint lithography, and mold

HIROSHIMA HIROSHI0 citations30