Inventor
OBERLITNER THOMAS H
US21 patents
⚠️ This page may combine multiple inventors who share the name “OBERLITNER THOMAS H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
18 patentsUS6309524B1Oct 30, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC107 citations99
US6318951B1Nov 20, 2001
Robots for microelectronic workpiece handling
SEMITOOL INC180 citations98
US6309520B1Oct 30, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC92 citations98
US5489341AFeb 6, 1996
Semiconductor processing with non-jetting fluid stream discharge array
SEMITOOL INC116 citations98
US5658387AAug 19, 1997
Semiconductor processing spray coating apparatus
SEMITOOL INC108 citations97
US6547937B1Apr 15, 2003
Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
SEMITOOL INC61 citations96
US6303010B1Oct 16, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC81 citations96
US5584310ADec 17, 1996
Semiconductor processing with non-jetting fluid stream discharge array
SEMITOOL INC62 citations96
US6322119B1Nov 27, 2001
Robots for microelectronic workpiece handling
SEMITOOL INC65 citations95
US7294244B2Nov 13, 2007
Microelectronic workpiece processing tool including a processing reactor having a paddle assembly for agitation of a processing fluid proximate to the workpiece
SEMITOOL INC20 citations92
US7138016B2Nov 21, 2006
Semiconductor processing apparatus
SEMITOOL INC31 citations92
US6869510B2Mar 22, 2005
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC26 citations92
US6746565B1Jun 8, 2004
Semiconductor processor with wafer face protection
SEMITOOL INC19 citations92
US6699373B2Mar 2, 2004
Apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC40 citations92
US6645356B1Nov 11, 2003
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC28 citations92
US6066575AMay 23, 2000
Semiconductor processing spray coating apparatus
SEMITOOL INC34 citations92
US7281741B2Oct 16, 2007
End-effectors for handling microelectronic workpieces
SEMITOOL INC12 citations83
US7094291B2Aug 22, 2006
Semiconductor processing apparatus
SEMITOOL INC5 citations73