Inventor
PEDERSEN JOHN M
US18 patents
Patents
18 patentsUS6309524B1Oct 30, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC107 citations99
US6309520B1Oct 30, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC92 citations98
US6303010B1Oct 16, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC81 citations96
US5660517AAug 26, 1997
Semiconductor processing system with wafer container docking and loading station
SEMITOOL INC84 citations96
US6911127B2Jun 28, 2005
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces
SEMITOOL INC17 citations92
US6869510B2Mar 22, 2005
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC26 citations92
US6699373B2Mar 2, 2004
Apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC40 citations92
US6673216B2Jan 6, 2004
Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing
SEMITOOL INC18 citations92
US6645356B1Nov 11, 2003
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC28 citations92
US6527925B1Mar 4, 2003
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces
SEMITOOL INC23 citations92
US6773560B2Aug 10, 2004
Dry contact assemblies and plating machines with dry contact assemblies for plating microelectronic workpieces
SEMITOOL INC39 citations91
US6471460B1Oct 29, 2002
Apparatus for processing a microelectronic workpiece including a workpiece cassette inventory assembly
SEMITOOL INC10 citations74
US7048841B2May 23, 2006
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces
SEMITOOL INC5 citations73
US6962649B2Nov 8, 2005
Contact assemblies, methods for making contact assemblies, and machines with contact assemblies for electrochemical processing of microelectronic workpieces
SEMITOOL INC8 citations73
US6939448B2Sep 6, 2005
Contact assemblies, methods for making contact assemblies, and plating machines with contact assemblies for plating microelectronic workpieces
SEMITOOL INC6 citations73
US7645366B2Jan 12, 2010
Microelectronic workpiece holders and contact assemblies for use therewith
SEMITOOL INC6 citations57
US7288179B2Oct 30, 2007
Method for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing
SEMITOOL INC0 citations52
US7288172B2Oct 30, 2007
Apparatus for providing electrical and fluid communication to a rotating microelectronic workpiece during electrochemical processing
SEMITOOL INC0 citations52