Inventor
ZILA VLADIMIR
CA15 patents
⚠️ This page may combine multiple inventors who share the name “ZILA VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMITOOL INC
14 patentsUS6309524B1Oct 30, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC107 citations99
US6309520B1Oct 30, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC92 citations98
US6203582B1Mar 20, 2001
Modular semiconductor workpiece processing tool
SEMITOOL INC154 citations98
US6091498AJul 18, 2000
Semiconductor processing apparatus having lift and tilt mechanism
SEMITOOL INC115 citations98
US5731678AMar 24, 1998
Processing head for semiconductor processing machines
SEMITOOL INC120 citations98
US6440178B2Aug 27, 2002
Modular semiconductor workpiece processing tool
SEMITOOL INC82 citations97
US6303010B1Oct 16, 2001
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC81 citations96
US7002698B2Feb 21, 2006
Semiconductor processing apparatus having lift and tilt mechanism
SEMITOOL INC44 citations95
US6645355B2Nov 11, 2003
Semiconductor processing apparatus having lift and tilt mechanism
SEMITOOL INC54 citations95
US6869510B2Mar 22, 2005
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC26 citations92
US6699373B2Mar 2, 2004
Apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC40 citations92
US6654122B1Nov 25, 2003
Semiconductor processing apparatus having lift and tilt mechanism
SEMITOOL INC31 citations92
US6645356B1Nov 11, 2003
Methods and apparatus for processing the surface of a microelectronic workpiece
SEMITOOL INC28 citations92
US7074246B2Jul 11, 2006
Modular semiconductor workpiece processing tool
SEMITOOL INC8 citations73