Inventor
LIN SHUN LI
TW12 patents
Patents
12 patentsUS7132334B2Nov 7, 2006
Methods of code programming a mask ROM device
MACRONIX INT CO LTD27 citations91
US6975974B2Dec 13, 2005
Overlay error model, sampling strategy and associated equipment for implementation
MACRONIX INT CO LTD26 citations89
US7586609B2Sep 8, 2009
Method for analyzing overlay errors
MACRONIX INT CO LTD9 citations81
US6563127B2May 13, 2003
Optical proximity correction with rectangular contact
MACRONIX INT CO LTD10 citations72
US6348384B1Feb 19, 2002
Method of using organic polymer as covering layer for device lightly doped drain structure
MACRONIX INT CO LTD10 citations72
US6627388B2Sep 30, 2003
Method for reducing roughness of photoresist through cross-linking reaction of deposit and photoresist
MACRONIX INT CO LTD11 citations69
US6660458B2Dec 9, 2003
Method of optical proximity correction
MACRONIX INT CO LTD6 citations61
US6960411B2Nov 1, 2005
Mask with extended mask clear-out window and method of dummy exposure using the same
MACRONIX INT CO LTD1 citations51
US7683487B2Mar 23, 2010
Structure applied to a photolithographic process
MACRONIX INT CO LTD0 citations45
US7008870B2Mar 7, 2006
Structure applied to a photolithographic process and method for fabricating a semiconductor device
MACRONIX INT CO LTD0 citations45
US7157215B2Jan 2, 2007
Photoresist with adjustable polarized light reaction and photolithography process using the photoresist
MACRONIX INT CO LTD0 citations39
US6576407B2Jun 10, 2003
Method of improving astigmatism of a photoresist layer
MACRONIX INT CO LTD0 citations39