Inventor

HERTZ HANS MARTIN

SE3 patents

Patents

3 patents

US6711233B2Mar 23, 2004

Method and apparatus for generating X-ray or EUV radiation

JETTEC AB33 citations89

US6760406B2Jul 6, 2004

Method and apparatus for generating X-ray or EUV radiation

JETTEC AB38 citations87

US10085702B2Oct 2, 2018

X-ray micro imaging

JETTEC AB0 citations38