Inventor
ZHANG YUNLIN
US7 patents
⚠️ This page may combine multiple inventors who share the name “ZHANG YUNLIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
3 patentsUS9482519B2Nov 1, 2016
Measuring semiconductor device features using stepwise optical metrology
IBM4 citations68
US10955359B2Mar 23, 2021
Method for quantification of process non uniformity using model-based metrology
IBM0 citations50
US8860956B2Oct 14, 2014
Spectrometry employing extinction coefficient modulation
IBM0 citations31