Inventor
CHEN WAN-LIN
US14 patents
⚠️ This page may combine multiple inventors who share the name “CHEN WAN-LIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
8 patentsUS7250371B2Jul 31, 2007
Reduction of feature critical dimensions
LAM RES CORP27 citations91
US7192531B1Mar 20, 2007
In-situ plug fill
LAM RES CORP14 citations84
US7022611B1Apr 4, 2006
Plasma in-situ treatment of chemically amplified resist
LAM RES CORP14 citations84
US7541291B2Jun 2, 2009
Reduction of feature critical dimensions
LAM RES CORP11 citations83
US6780569B1Aug 24, 2004
Post-development treatment of patterned photoresist to promote cross-linking of polymer chains
LAM RES CORP13 citations83
US7347915B1Mar 25, 2008
Plasma in-situ treatment of chemically amplified resist
LAM RES CORP8 citations73
US9865472B2Jan 9, 2018
Fabrication of a silicon structure and deep silicon etch with profile control
LAM RES CORP3 citations70
US7226869B2Jun 5, 2007
Methods for protecting silicon or silicon carbide electrode surfaces from morphological modification during plasma etch processing
LAM RES CORP1 citations46