Inventor
KOMATSU TAKEHIKO
JP5 patents
Patents
5 patentsUS6403491B1Jun 11, 2002
Etch method using a dielectric etch chamber with expanded process window
APPLIED MATERIALS INC396 citations97
US6451703B1Sep 17, 2002
Magnetically enhanced plasma etch process using a heavy fluorocarbon etching gas
APPLIED MATERIALS INC96 citations96
US6362109B1Mar 26, 2002
Oxide/nitride etching having high selectivity to photoresist
APPLIED MATERIALS INC73 citations93
US6613689B2Sep 2, 2003
Magnetically enhanced plasma oxide etch using hexafluorobutadiene
APPLIED MATERIALS INC38 citations91
US6897154B2May 24, 2005
Selective etching of low-k dielectrics
APPLIED MATERIALS INC12 citations79