Inventor
KIPP ANDREAS
DE3 patents
Patents
3 patentsUS6571629B1Jun 3, 2003
Micromechanical spring structure, in particular, for a rotation rate sensor
BOSCH GMBH ROBERT24 citations88
US6536282B1Mar 25, 2003
Sensor, composed of a multilayer substrate, having a spring element that is delineated out of a semiconductor layer
BOSCH GMBH ROBERT12 citations71
US6940632B1Sep 6, 2005
Micromechanical structure, in particular for an acceleration sensor
BOSCH GMBH ROBERT1 citations49