Inventor

GOETZ SIEGBERT

DE5 patents

Patents

5 patents

US6752017B2Jun 22, 2004

Rotation speed sensor

BOSCH GMBH ROBERT76 citations97

US6705164B2Mar 16, 2004

Rotation rate sensor

BOSCH GMBH ROBERT58 citations95

US6691571B2Feb 17, 2004

Rotational speed sensor

BOSCH GMBH ROBERT50 citations92

US7134337B2Nov 14, 2006

Micromechanical rotational rate sensor

BOSCH GMBH ROBERT16 citations83

US6940632B1Sep 6, 2005

Micromechanical structure, in particular for an acceleration sensor

BOSCH GMBH ROBERT1 citations49