Inventor
PAUL HANS-JOCHEN
DE13 patents
⚠️ This page may combine multiple inventors who share the name “PAUL HANS-JOCHEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT AG
7 patentsUS7196842B2Mar 27, 2007
Attenuating filter for ultraviolet light
ZEISS CARL SMT AG34 citations91
US6697194B2Feb 24, 2004
Antireflection coating for ultraviolet light at large angles of incidence
ZEISS CARL SMT AG15 citations82
US6863398B2Mar 8, 2005
Method and coating system for coating substrates for optical components
ZEISS CARL SMT AG8 citations71
US6825976B2Nov 30, 2004
Antireflection coating for ultraviolet light
ZEISS CARL SMT AG9 citations71
US6836379B2Dec 28, 2004
Catadioptric objective
ZEISS CARL SMT AG2 citations62
US7093937B2Aug 22, 2006
Optical component and coating system for coating substrates for optical components
ZEISS CARL SMT AG2 citations60
US6967771B2Nov 22, 2005
Antireflection coating for ultraviolet light at large angles of incidence
ZEISS CARL SMT AG0 citations44
ZEISS CARL SMT GMBH
3 patentsUS10474036B2Nov 12, 2019
Optical element and optical arrangement therewith
ZEISS CARL SMT GMBH1 citations62
US9915876B2Mar 13, 2018
EUV mirror and optical system comprising EUV mirror
ZEISS CARL SMT GMBH0 citations40
US9915873B2Mar 13, 2018
Reflective optical element, and optical system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations36