Inventor
LEUNG GARLEN C
US9 patents
⚠️ This page may combine multiple inventors who share the name “LEUNG GARLEN C”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS7553214B2Jun 30, 2009
Polishing article with integrated window stripe
APPLIED MATERIALS INC23 citations91
US7063597B2Jun 20, 2006
Polishing processes for shallow trench isolation substrates
APPLIED MATERIALS INC30 citations88
US9362186B2Jun 7, 2016
Polishing with eddy current feed meaurement prior to deposition of conductive layer
APPLIED MATERIALS INC10 citations83
US7601050B2Oct 13, 2009
Polishing apparatus with grooved subpad
APPLIED MATERIALS INC11 citations82
US9811077B2Nov 7, 2017
Polishing with pre deposition spectrum
APPLIED MATERIALS INC2 citations72
US7841925B2Nov 30, 2010
Polishing article with integrated window stripe
APPLIED MATERIALS INC3 citations61
US10651098B2May 12, 2020
Polishing with measurement prior to deposition of outer layer
APPLIED MATERIALS INC0 citations51