Inventor
LEE CHRISTOPHER HEUNG-GYUN
US10 patents
⚠️ This page may combine multiple inventors who share the name “LEE CHRISTOPHER HEUNG-GYUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
8 patentsUS7063597B2Jun 20, 2006
Polishing processes for shallow trench isolation substrates
APPLIED MATERIALS INC30 citations88
US7086933B2Aug 8, 2006
Flexible polishing fluid delivery system
APPLIED MATERIALS INC21 citations87
US10350728B2Jul 16, 2019
System and process for in situ byproduct removal and platen cooling during CMP
APPLIED MATERIALS INC9 citations81
US10322492B2Jun 18, 2019
Retaining ring for CMP
APPLIED MATERIALS INC3 citations72
US9498866B2Nov 22, 2016
Polishing pad cleaning with vacuum apparatus
APPLIED MATERIALS INC3 citations68
US11673226B2Jun 13, 2023
Retaining ring for CMP
APPLIED MATERIALS INC0 citations62
US11819976B2Nov 21, 2023
Spray system for slurry reduction during chemical mechanical polishing (cmp)
APPLIED MATERIALS INC0 citations46
US11794305B2Oct 24, 2023
Platen surface modification and high-performance pad conditioning to improve CMP performance
APPLIED MATERIALS INC0 citations38