Inventor
DUBS MARTIN
CH14 patents
⚠️ This page may combine multiple inventors who share the name “DUBS MARTIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
UNAXIS BALZERS LTD
4 patentsUS6692618B2Feb 17, 2004
Magnetron sputter source with multipart target
UNAXIS BALZERS LTD28 citations92
US6860977B2Mar 1, 2005
Method for manufacturing a workpiece using a magnetron sputter source
UNAXIS BALZERS LTD12 citations82
US6682637B2Jan 27, 2004
Magnetron sputter source
UNAXIS BALZERS LTD7 citations72
US6802942B2Oct 12, 2004
Storage plate support for receiving disk-shaped storage plates
UNAXIS BALZERS LTD2 citations61
UNAXIS BALZERS AG
3 patentsUS6899795B1May 31, 2005
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
UNAXIS BALZERS AG34 citations92
US6776882B2Aug 17, 2004
Method for producing a hybrid disk and hybrid disks
UNAXIS BALZERS AG3 citations62
US7033471B2Apr 25, 2006
Sputter chamber as well as vacuum transport chamber and vacuum handling apparatus with such chambers
UNAXIS BALZERS AG0 citations51