Inventor
COLBURN MATTHEW EARL
US6 patents
⚠️ This page may combine multiple inventors who share the name “COLBURN MATTHEW EARL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
4 patentsUS7084479B2Aug 1, 2006
Line level air gaps
IBM27 citations90
US7371684B2May 13, 2008
Process for preparing electronics structures using a sacrificial multilayer hardmask scheme
IBM12 citations82
US7947907B2May 24, 2011
Electronics structures using a sacrificial multi-layer hardmask scheme
IBM5 citations71
US7863150B2Jan 4, 2011
Method to generate airgaps with a template first scheme and a self aligned blockout mask
IBM3 citations55