Inventor

SANKARAN SUJATHA

US17 patents

⚠️ This page may combine multiple inventors who share the name “SANKARAN SUJATHA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

SANKARAN SUJATHA

IBM

Device and methodology for reducing effective dielectric constant in semiconductor devices

Device and methodology for reducing effective dielectric constant in semiconductor devices

Interconnect structure for integrated circuits having improved electromigration characteristics

Device and methodology for reducing effective dielectric constant in semiconductor devices

Structure and method of forming electrically blown metal fuses for integrated circuits

Process for preparing electronics structures using a sacrificial multilayer hardmask scheme

Interconnect structure and process of making the same

Device and methodology for reducing effective dielectric constant in semiconductor devices

Dry etchback of interconnect contacts

Electronics structures using a sacrificial multi-layer hardmask scheme

Reliability of wide interconnects

Test structure for determining optimal seed and liner layer thicknesses for dual damascene processing

Embedded barrier for dielectric encapsulation

Dry etchback of interconnect contacts

Method of forming an embedded barrier layer for protection from chemical mechanical polishing process

EDELSTEIN DANIEL C

Reducing effective dielectric constant in semiconductor devices

BONILLA GRISELDA

Capping of copper interconnect lines in integrated circuit devices