Inventor
SAKAMOTO SHINJI
JP18 patents
⚠️ This page may combine multiple inventors who share the name “SAKAMOTO SHINJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
NUFLARE TECHNOLOGY INC
4 patentsUS9779913B2Oct 3, 2017
Charged particle beam drawing apparatus and drawing data generation method
NUFLARE TECHNOLOGY INC2 citations71
US7786453B2Aug 31, 2010
Charged-particle beam pattern writing method and apparatus with a pipeline process to transfer data
NUFLARE TECHNOLOGY INC4 citations62
US10971331B2Apr 6, 2021
Writing data generation method, computer-readable recording medium on which program is recorded, and multi-charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC1 citations54
US10096452B2Oct 9, 2018
Data processing method, charged particle beam writing method, and charged particle beam writing apparatus
NUFLARE TECHNOLOGY INC0 citations41