Inventor
SHERWOOD TYLER
US13 patents
Patents
13 patentsUS11586067B2Feb 21, 2023
Structure and method of advanced LCoS back-plane having robust pixel via metallization
APPLIED MATERIALS INC5 citations73
US11573452B2Feb 7, 2023
Method for LCoS DBR multilayer stack protection via sacrificial hardmask for RIE and CMP processes
APPLIED MATERIALS INC5 citations73
US12055821B2Aug 6, 2024
Structure and method of bi-layer pixel isolation in advanced LCOS back-plane
APPLIED MATERIALS INC0 citations62
US11705490B2Jul 18, 2023
Graded doping in power devices
APPLIED MATERIALS INC0 citations62
US11881539B2Jan 23, 2024
Structure and method of advanced LCoS back-plane having highly reflective pixel via metallization
APPLIED MATERIALS INC0 citations61
US11880052B2Jan 23, 2024
Structure and method of mirror grounding in LCoS devices
APPLIED MATERIALS INC0 citations61
US11456171B2Sep 27, 2022
Deep trench integration processes and devices
APPLIED MATERIALS INC0 citations61
US11410873B2Aug 9, 2022
Deep trench integration processes and devices
APPLIED MATERIALS INC0 citations61
US11908678B2Feb 20, 2024
Method of CMP integration for improved optical uniformity in advanced LCOS back-plane
APPLIED MATERIALS INC0 citations59
US11830824B2Nov 28, 2023
Edge protection on semiconductor substrates
APPLIED MATERIALS INC0 citations58
US11769665B2Sep 26, 2023
Power device structures and methods of making
APPLIED MATERIALS INC0 citations57
US11605741B2Mar 14, 2023
Methods of forming doped silicide power devices
APPLIED MATERIALS INC0 citations56
US12033964B2Jul 9, 2024
Chemical mechanical polishing for copper dishing control
APPLIED MATERIALS INC0 citations47