Inventor
SAKAMOTO RYOICHI
JP9 patents
Patents
9 patentsUS9162435B2Oct 20, 2015
Peel-off apparatus, peel-off system, peel-off method and computer storage medium
TOKYO ELECTRON LTD10 citations82
US9724906B2Aug 8, 2017
Delamination method, delamination device, and delamination system
TOKYO ELECTRON LTD9 citations81
US9601365B2Mar 21, 2017
Peeling device, peeling system, and peeling method
TOKYO ELECTRON LTD3 citations71
US9576854B2Feb 21, 2017
Peeling apparatus, peeling system, and peeling method
TOKYO ELECTRON LTD4 citations71
US12157293B2Dec 3, 2024
Separating method, separating apparatus, and separating system
TOKYO ELECTRON LTD0 citations59
US12394749B2Aug 19, 2025
Bonding system and surface modification method
TOKYO ELECTRON LTD0 citations51
US12469685B2Nov 11, 2025
Surface modifying apparatus and bonding strength determination method
TOKYO ELECTRON LTD0 citations50
US9643396B2May 9, 2017
Peeling device, peeling system and peeling method
TOKYO ELECTRON LTD1 citations50
US12538720B2Jan 27, 2026
Bonding system
TOKYO ELECTRON LTD0 citations47