Inventor
LEE TSUNG-HSUN
TW7 patents
⚠️ This page may combine multiple inventors who share the name “LEE TSUNG-HSUN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
4 patentsUS9574875B2Feb 21, 2017
Wafer or reticle thermal deformation measuring techniques
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US12292687B2May 6, 2025
Width adjustment of EUV radiation beam
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11796917B2Oct 24, 2023
Width adjustment of EUV radiation beam
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10678148B2Jun 9, 2020
Lithography system and lithography method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40