Inventor
HO KAI-FA
TW8 patents
⚠️ This page may combine multiple inventors who share the name “HO KAI-FA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
7 patentsUS11822256B2Nov 21, 2023
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD5 citations85
US9574875B2Feb 21, 2017
Wafer or reticle thermal deformation measuring techniques
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations68
US12298672B2May 13, 2025
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12265336B2Apr 1, 2025
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US12111583B2Oct 8, 2024
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11809087B2Nov 7, 2023
Semiconductor processing tool and methods of operation
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11195743B2Dec 7, 2021
Adjustable substrate support and adjustment method
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations50