Inventor
SOTOZAKI HIROSHI
JP20 patents
⚠️ This page may combine multiple inventors who share the name “SOTOZAKI HIROSHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
18 patentsUS6643882B1Nov 11, 2003
Substrate cleaning apparatus
EBARA CORP64 citations95
US6851152B2Feb 8, 2005
Substrate cleaning apparatus
EBARA CORP28 citations92
US6616512B2Sep 9, 2003
Substrate cleaning apparatus and substrate polishing apparatus with substrate cleaning apparatus
EBARA CORP20 citations92
US6494985B1Dec 17, 2002
Method and apparatus for polishing a substrate
EBARA CORP44 citations91
US10486285B2Nov 26, 2019
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US9358662B2Jun 7, 2016
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US7850817B2Dec 14, 2010
Polishing device and substrate processing device
EBARA CORP15 citations83
US9434044B2Sep 6, 2016
Polishing apparatus
EBARA CORP8 citations79
US11426834B2Aug 30, 2022
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP1 citations73
US11007621B2May 18, 2021
Polishing apparatus and polishing method
EBARA CORP3 citations72
US11612983B2Mar 28, 2023
Polishing apparatus and polishing method
EBARA CORP0 citations62
US9687957B2Jun 27, 2017
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP0 citations52
US10661411B2May 26, 2020
Apparatus for cleaning a polishing surface, polishing apparatus, and method of manufacturing an apparatus for cleaning a polishing surface
EBARA CORP0 citations51
US12179312B2Dec 31, 2024
Apparatus for polishing, processing system, and method of polishing
EBARA CORP0 citations50
US10987776B2Apr 27, 2021
Calibration method and non-transitory computer-readable storage medium storing a program of calibration
EBARA CORP0 citations49
US11642755B2May 9, 2023
Apparatus for polishing and method for polishing
EBARA CORP0 citations48
US11465256B2Oct 11, 2022
Apparatus for polishing and method for polishing
EBARA CORP0 citations48
US10730162B2Aug 4, 2020
Turntable cloth peeling jig
EBARA CORP0 citations41