Inventor
MORISAWA SHINYA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “MORISAWA SHINYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
EBARA CORP
10 patentsUS6615854B1Sep 9, 2003
Wafer cleaning apparatus
EBARA CORP55 citations95
US6558478B1May 6, 2003
Method of and apparatus for cleaning substrate
EBARA CORP65 citations94
US6921466B2Jul 26, 2005
Revolution member supporting apparatus and semiconductor substrate processing apparatus
EBARA CORP48 citations92
US10486285B2Nov 26, 2019
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US9358662B2Jun 7, 2016
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP9 citations84
US7736474B2Jun 15, 2010
Plating apparatus and plating method
EBARA CORP8 citations82
US11426834B2Aug 30, 2022
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP1 citations73
US7037853B2May 2, 2006
Wafer cleaning apparatus
EBARA CORP10 citations73
US6745784B2Jun 8, 2004
Method of and apparatus for cleaning substrate
EBARA CORP11 citations71
US9687957B2Jun 27, 2017
Substrate processing apparatus, substrate processing method, substrate holding mechanism, and substrate holding method
EBARA CORP0 citations52