Inventor

WANG MEILIANG

CN26 patents

⚠️ This page may combine multiple inventors who share the name “WANG MEILIANG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

WANG MEILIANG

VERSUM MAT US LLC

Organoaminosilane precursors and methods for depositing films comprising same

Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films

Compositions and methods for making silicon containing films

Organoaminosilane precursors and methods for depositing films comprising same

Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films

Trisilylamine derivatives as precursors for high growth rate silicon-containing films

Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films

High temperature atomic layer deposition of silicon-containing films

Carbon bridged aminosilane compounds for high growth rate silicon-containing films

High temperature atomic layer deposition of silicon-containing film

Organoamino-functionalized linear and cyclic oligosiloxanes for deposition of silicon-containing films

Organoaminodisilazanes for high temperature atomic layer deposition of silicon oxide thin films

Trisilylamine derivatives as precursors for high growth rate silicon-containing films

High temperature atomic layer deposition of silicon oxide thin films

Compositions and methods for the deposition of silicon oxide films

Compositions and methods for the deposition of silicon oxide films

Composition for high temperature atomic layer deposition of high quality silicon oxide thin films

Organoamino-functionalized cyclic oligosiloxanes for deposition of silicon-containing films

Deposition of carbon doped silicon oxide

Organoaminosilane precursors and methods for depositing films comprising same

Compositions and methods using same for non-conformal deposition of silicon containing films

Organoamino-polysiloxanes for deposition of silicon-containing films

Stable alkenyl or alkynyl-containing organosilicon precursor compositions

AIR PROD & CHEM

High temperature atomic layer deposition of silicon oxide thin films

High temperature atomic layer deposition of silicon oxide thin films

VERSON MAT US LLC

Organoaminosilane precursors and methods for depositing films comprising same