Inventor
CHUA LEE PENG
US27 patents
⚠️ This page may combine multiple inventors who share the name “CHUA LEE PENG”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
14 patentsUS10053793B2Aug 21, 2018
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
LAM RES CORP6 citations84
US10094034B2Oct 9, 2018
Edge flow element for electroplating apparatus
LAM RES CORP11 citations83
US9567685B2Feb 14, 2017
Apparatus and method for dynamic control of plated uniformity with the use of remote electric current
LAM RES CORP11 citations83
US10233556B2Mar 19, 2019
Dynamic modulation of cross flow manifold during electroplating
LAM RES CORP7 citations82
US10094035B1Oct 9, 2018
Convection optimization for mixed feature electroplating
LAM RES CORP14 citations78
US10982346B2Apr 20, 2021
Integrated elastomeric lipseal and cup bottom for reducing wafer sticking
LAM RES CORP3 citations73
US10014170B2Jul 3, 2018
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
LAM RES CORP3 citations72
US9988733B2Jun 5, 2018
Apparatus and method for modulating azimuthal uniformity in electroplating
LAM RES CORP3 citations72
US11585007B2Feb 21, 2023
Cross flow conduit for foaming prevention in high convection plating cells
LAM RES CORP2 citations71
US10923340B2Feb 16, 2021
Apparatus and method for electrodeposition of metals with the use of an ionically resistive ionically permeable element having spatially tailored resistivity
LAM RES CORP0 citations62
US12157949B2Dec 3, 2024
Cross flow conduit for foaming prevention in high convection plating cells
LAM RES CORP1 citations60
US12241173B2Mar 4, 2025
Wafer shielding for prevention of lipseal plate-out
LAM RES CORP0 citations59
US12559853B2Feb 24, 2026
Differential contrast plating for advanced packaging applications
LAM RES CORP0 citations49
US12293943B2May 6, 2025
Gold through silicon mask plating
LAM RES CORP0 citations47
NOVELLUS SYSTEMS INC
11 patentsUS9534308B2Jan 3, 2017
Protecting anodes from passivation in alloy plating systems
NOVELLUS SYSTEMS INC5 citations84
US9476139B2Oct 25, 2016
Cleaning electroplating substrate holders using reverse current deplating
NOVELLUS SYSTEMS INC10 citations84
US9613833B2Apr 4, 2017
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC7 citations81
US10954605B2Mar 23, 2021
Protecting anodes from passivation in alloy plating systems
NOVELLUS SYSTEMS INC1 citations73
US10106907B2Oct 23, 2018
Protecting anodes from passivation in alloy plating systems
NOVELLUS SYSTEMS INC2 citations73
US10087545B2Oct 2, 2018
Automated cleaning of wafer plating assembly
NOVELLUS SYSTEMS INC3 citations73
US10092933B2Oct 9, 2018
Methods and apparatuses for cleaning electroplating substrate holders
NOVELLUS SYSTEMS INC6 citations72
US10128102B2Nov 13, 2018
Methods and apparatus for wetting pretreatment for through resist metal plating
NOVELLUS SYSTEMS INC2 citations71
US9359688B1Jun 7, 2016
Apparatuses and methods for controlling PH in electroplating baths
NOVELLUS SYSTEMS INC5 citations71
US11542630B2Jan 3, 2023
Cleaning electroplating substrate holders using reverse current deplating
NOVELLUS SYSTEMS INC0 citations62
US10538855B2Jan 21, 2020
Cleaning electroplating substrate holders using reverse current deplating
NOVELLUS SYSTEMS INC1 citations62