Inventor
HSU MENG-FANG
TW10 patents
Patents
10 patentsUS10276676B1Apr 30, 2019
Methods of forming metal gate isolation
TAIWAN SEMICONDUCTOR MFG CO LTD25 citations93
US10043712B1Aug 7, 2018
Semiconductor structure and manufacturing method thereof
TAIWAN SEMICONDUCTOR MFG CO LTD11 citations82
US10770559B2Sep 8, 2020
Gate structure and methods of forming metal gate isolation
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9911805B2Mar 6, 2018
Silicon recess etch and epitaxial deposit for shallow trench isolation (STI)
TAIWAN SEMICONDUCTOR MFG CO LTD3 citations72
US9129823B2Sep 8, 2015
Silicon recess ETCH and epitaxial deposit for shallow trench isolation (STI)
TAIWAN SEMICONDUCTOR MFG CO LTD4 citations72
US12575387B2Mar 10, 2026
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US11869800B2Jan 9, 2024
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations62
US10692750B2Jun 23, 2020
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9972524B2May 15, 2018
Method for fabricating a semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51
US9502533B2Nov 22, 2016
Silicon recess etch and epitaxial deposit for shallow trench isolation (STI)
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations51