Inventor
VAN DRENT WILLIAM PETER
NL11 patents
⚠️ This page may combine multiple inventors who share the name “VAN DRENT WILLIAM PETER”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
7 patentsUS11340532B2May 24, 2022
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV5 citations79
US9696638B2Jul 4, 2017
Lithographic apparatus
ASML NETHERLANDS BV3 citations72
US11022902B2Jun 1, 2021
Sensor, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV0 citations62
US11846887B2Dec 19, 2023
Prolonging optical element lifetime in an EUV lithography system
ASML NETHERLANDS BV1 citations57
US11982947B2May 14, 2024
Contamination trap
ASML NETHERLANDS BV0 citations56
US11556067B2Jan 17, 2023
Contamination trap
ASML NETHERLANDS BV1 citations56
US9229340B2Jan 5, 2016
Lithographic apparatus
ASML NETHERLANDS BV0 citations51
ZEISS CARL SMT GMBH
2 patentsUS11194256B2Dec 7, 2021
Optical diffraction component for suppressing at least one target wavelength by destructive interference
ZEISS CARL SMT GMBH5 citations81
US10852640B2Dec 1, 2020
Optical diffraction component for suppressing at least one target wavelength by destructive interference
ZEISS CARL SMT GMBH2 citations70