Inventor
KAI AKIKO
JP9 patents
Patents
9 patentsUS12261064B2Mar 25, 2025
Tank, substrate processing apparatus, and method of using the tank
TOKYO ELECTRON LTD1 citations58
US11823918B2Nov 21, 2023
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations58
US11488846B2Nov 1, 2022
Substrate processing method and substrate processing apparatus
TOKYO ELECTRON LTD0 citations58
US11720026B2Aug 8, 2023
Developing treatment method, computer storage medium and developing treatment apparatus
TOKYO ELECTRON LTD0 citations50
US11508589B2Nov 22, 2022
Substrate processing method, substrate processing apparatus and recording medium
TOKYO ELECTRON LTD0 citations50
US11960209B2Apr 16, 2024
Developing treatment method and developing treatment apparatus
TOKYO ELECTRON LTD0 citations49
US9972512B2May 15, 2018
Liquid processing method, memory medium and liquid processing apparatus
TOKYO ELECTRON LTD0 citations48
US9786488B2Oct 10, 2017
Liquid processing method, memory medium and liquid processing apparatus
TOKYO ELECTRON LTD0 citations48
US11848189B2Dec 19, 2023
Substrate processing method, recording medium and substrate processing apparatus
TOKYO ELECTRON LTD0 citations46