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Inventor
OTA TOMOO
JP
2 patents
Patents
2 patents
US12009726B2
Jun 11, 2024
Vacuum pump and magnetic-bearing-integrated motor
SHIMADZU CORP
0 citations
47
US12117009B2
Oct 15, 2024
Vacuum pump including magnetic bearing and motor bearing operable as radial magnetic bearing, motor, and thrust magnetic bearing
SHIMADZU CORP
0 citations
44