Inventor
TSAI YUNG-LI
TW13 patents
⚠️ This page may combine multiple inventors who share the name “TSAI YUNG-LI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG CO LTD
12 patentsUS9583352B2Feb 28, 2017
Method of etching and cleaning wafers
TAIWAN SEMICONDUCTOR MFG CO LTD2 citations68
US12543528B2Feb 3, 2026
Contamination control in semiconductor manufacturing systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12257610B2Mar 25, 2025
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12068179B2Aug 20, 2024
Systems and methods for shuttered wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US12020964B2Jun 25, 2024
Contamination control in semiconductor manufacturing systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11958090B2Apr 16, 2024
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11766703B2Sep 26, 2023
Apparatus and method for wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11355366B2Jun 7, 2022
Systems and methods for shuttered wafer cleaning
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US11282728B2Mar 22, 2022
Contamination control in semiconductor manufacturing systems
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations59
US10943804B2Mar 9, 2021
Monitoring of process chamber
TAIWAN SEMICONDUCTOR MFG CO LTD1 citations59
US11139183B2Oct 5, 2021
Systems and methods for dry wafer transport
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations48
US12521775B2Jan 13, 2026
Semiconductor device manufacturing system and method for manufacturing semiconductor device
TAIWAN SEMICONDUCTOR MFG CO LTD0 citations47