Inventor

BHOWMICK RANADEEP

US17 patents

⚠️ This page may combine multiple inventors who share the name “BHOWMICK RANADEEP”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

BHOWMICK RANADEEP

LAM RES CORP

Three or more states for achieving high aspect ratio dielectric etch

Systems and methods for optimizing power delivery to an electrode of a plasma chamber

Low frequency RF generator and associated electrostatic chuck

Systems and methods for optimizing power delivery to an electrode of a plasma chamber

Three or more states for achieving high aspect ratio dielectric etch

Systems and methods for use of low frequency harmonics in bias radiofrequency supply to control uniformity of plasma process results across substrate

Systems and methods for optimizing power delivery to an electrode of a plasma chamber

Process control for ion energy delivery using multiple generators and phase control

Systems and methods for extracting process control information from radiofrequency supply system of plasma processing system

Impedance match with an elongated RF strap

Systems and methods for controlling a plasma sheath characteristic

Radiofrequency signal filter arrangement for plasma processing system

Systems and methods for using binning to increase power during a low frequency cycle

Fluorocarbon based aspect-ratio independent etching

Active feedback control of subsystems of a process module

MKS INSTR INC

High speed synchronization of plasma source/bias power delivery

High speed synchronization of plasma source/bias power delivery