Inventor
PIUMI DANIELE
BE5 patents
Patents
5 patentsUS12055863B2Aug 6, 2024
Structures and methods for use in photolithography
ASM IP HOLDING BV2 citations69
US11644758B2May 9, 2023
Structures and methods for use in photolithography
ASM IP HOLDING BV3 citations69
US12169361B2Dec 17, 2024
Substrate processing apparatus and method
ASM IP HOLDING BV0 citations48
US11735422B2Aug 22, 2023
Method of forming a photoresist underlayer and structure including same
ASM IP HOLDING BV0 citations45
US12255053B2Mar 18, 2025
Methods and systems for depositing a layer
ASM IP HOLDING BV0 citations42