Inventor
YUE SHIYU
US5 patents
Patents
5 patentsUS12568804B2Mar 3, 2026
Method of in-situ selective metal removal via gradient oxidation for gapfill
APPLIED MATERIALS INC0 citations60
US12112890B2Oct 8, 2024
Top magnets for decreased non-uniformity in PVD
APPLIED MATERIALS INC0 citations59
US12406884B2Sep 2, 2025
Self field-suppression CVD tungsten (W) fill on PVD W liner
APPLIED MATERIALS INC0 citations48
US12394619B2Aug 19, 2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL
APPLIED MATERIALS INC0 citations48
US12374568B2Jul 29, 2025
One chamber multi-station selective metal removal
APPLIED MATERIALS INC0 citations47