Inventor

PATEL SAHIL JAYKUMAR

US2 patents

Patents

2 patents

US12394619B2Aug 19, 2025

Metal oxide preclean for bottom-up gapfill in MEOL and BEOL

APPLIED MATERIALS INC0 citations48

US12374568B2Jul 29, 2025

One chamber multi-station selective metal removal

APPLIED MATERIALS INC0 citations47