Inventor
QI ZHIMIN
US5 patents
Patents
5 patentsUS12272551B2Apr 8, 2025
Selective metal removal with flowable polymer
APPLIED MATERIALS INC0 citations59
US12469747B2Nov 11, 2025
Selective metal selectivity improvement with RF pulsing
APPLIED MATERIALS INC0 citations56
US12272659B2Apr 8, 2025
Methods for forming metal gapfill with low resistivity
APPLIED MATERIALS INC0 citations56
US12406884B2Sep 2, 2025
Self field-suppression CVD tungsten (W) fill on PVD W liner
APPLIED MATERIALS INC0 citations48
US12394619B2Aug 19, 2025
Metal oxide preclean for bottom-up gapfill in MEOL and BEOL
APPLIED MATERIALS INC0 citations48