Inventor
OKAMURA KOUJI
JP13 patents
⚠️ This page may combine multiple inventors who share the name “OKAMURA KOUJI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
7 patentsUS6147329ANov 14, 2000
Resist processing system and resist processing method
TOKYO ELECTRON LTD23 citations92
US5849602ADec 15, 1998
Resist processing process
TOKYO ELECTRON LTD28 citations92
US6568847B2May 27, 2003
Judging method and processing apparatus
TOKYO ELECTRON LTD21 citations90
US7815366B2Oct 19, 2010
Method of detecting extraneous matter on heat processing plate, heat processing apparatus, program, and computer-readable recording medium with program recorded thereon
TOKYO ELECTRON LTD6 citations62
US7844359B2Nov 30, 2010
Coating and developing apparatus, operating method for same, and storage medium for the method
TOKYO ELECTRON LTD4 citations58
US7060115B2Jun 13, 2006
Substrate processing method, substrate processing apparatus and substrate carrying method
TOKYO ELECTRON LTD4 citations57
US6461986B2Oct 8, 2002
Substrate processing method apparatus and substrate carrying method
TOKYO ELECTRON LTD1 citations46