Inventor
JUFFERMANS CASPARUS A H
NL5 patents
Patents
5 patentsUS6248486B1Jun 19, 2001
Method of detecting aberrations of an optical imaging system
PHILIPS CORP91 citations96
US6368763B2Apr 9, 2002
Method of detecting aberrations of an optical imaging system
PHILIPS CORP69 citations95
US6331368B2Dec 18, 2001
Test object for use in detecting aberrations of an optical imaging system
PHILIPS CORP14 citations72
US6291352B1Sep 18, 2001
Method of manufacturing a semiconductor device
PHILIPS CORP8 citations72
US5866283AFeb 2, 1999
Method of monitoring a photolithographic process through utilization of fractional radiant energy test pattern
PHILIPS CORP4 citations54