Inventor
HUO DAVID DATONG
US9 patents
Patents
9 patentsUS6162297ADec 19, 2000
Embossed semiconductor fabrication parts
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US7186171B2Mar 6, 2007
Composite retaining ring
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US6274854B1Aug 14, 2001
Method and apparatus for baking out a gate valve in a semiconductor processing system
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US7264536B2Sep 4, 2007
Polishing pad with window
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US7547243B2Jun 16, 2009
Method of making and apparatus having polishing pad with window
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US5965046AOct 12, 1999
Method and apparatus for baking out a gate valve in a semiconductor processing system
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US5901751AMay 11, 1999
Restrictor shield having a variable effective throughout area
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US6000415ADec 14, 1999
Method and apparatus for positioning a restrictor shield of a pump in response to an electric signal
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US7503837B2Mar 17, 2009
Composite retaining ring
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