Inventor

SUZUKI SETSU

JP6 patents

⚠️ This page may combine multiple inventors who share the name “SUZUKI SETSU”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CANON SALES CO INC

4 patents

US5834730ANov 10, 1998

Plasma processing equipment and gas discharging device

CANON SALES CO INC32 citations92

US6225236B1May 1, 2001

Method for reforming undercoating surface and method for production of semiconductor device

CANON SALES CO INC43 citations91

US6124210ASep 26, 2000

Method of cleaning surface of substrate and method of manufacturing semiconductor device

CANON SALES CO INC25 citations89

US6133162AOct 17, 2000

Method of forming a film by using plasmanized process gas containing gaseous H2 O and an auxiliary gas in a semiconductor device

CANON SALES CO INC12 citations73

SEMICONDUCTOR PROCESS LAB CO

1 patent

US6900144B2May 31, 2005

Film-forming surface reforming method and semiconductor device manufacturing method

SEMICONDUCTOR PROCESS LAB CO6 citations72

CANON SALES CO LTD

1 patent

US6548426B1Apr 15, 2003

Method for improving a quality of dielectric layer and semiconductor device

CANON SALES CO LTD5 citations56