Inventor
TSENG HUA-JEN
TW13 patents
Patents
13 patentsUS5942041AAug 24, 1999
Non-sticking semi-conductor wafer clamp and method of making same
MOSEL VITELIC INC30 citations91
US6019664AFeb 1, 2000
Height gauge device for wafer
MOSEL VITELIC INC8 citations71
US5892232AApr 6, 1999
Arc chamber for ion implanter
MOSEL VITELIC INC12 citations70
US6291827B1Sep 18, 2001
Insulating apparatus for a conductive line
MOSEL VITELIC INC5 citations61
US6334258B1Jan 1, 2002
Inspection device for examining a piece of aperture graphite of an extraction electrode
MOSEL VITELIC INC6 citations59
US6149078ANov 21, 2000
Slurry nozzle
MOSEL VITELIC INC2 citations59
US6696672B2Feb 24, 2004
Heating lamp brackets for reaction chambers of evaporation coating machines
MOSEL VITELIC INC2 citations53
US6130433AOct 10, 2000
Ion source chamber of a high energy implanter with a filtering device
MOSEL VITELIC INC0 citations50
US6568988B1May 27, 2003
Chemical mechanical polishing apparatus with stable signals
MOSEL VITELIC INC0 citations49
US6386213B1May 14, 2002
Plate-tilting apparatus
MOSEL VITELIC INC1 citations48
US6386139B1May 14, 2002
Wafer load/unload apparatus for E-Gun evaporation process
MOSEL VITELIC INC0 citations46
US6826822B2Dec 7, 2004
Method for preparing rubber plate used in an ion implanter
MOSEL VITELIC INC0 citations45
US6299218B1Oct 9, 2001
Connecting structure between fluid channel
MOSEL VITELIC INC0 citations36