Inventor
LIM TIAN H
US8 patents
⚠️ This page may combine multiple inventors who share the name “LIM TIAN H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
7 patentsUS7326657B2Feb 5, 2008
Post-deposition treatment to enhance properties of Si-O-C low k films
APPLIED MATERIALS INC524 citations99
US6635575B1Oct 21, 2003
Methods and apparatus to enhance properties of Si-O-C low K films
APPLIED MATERIALS INC150 citations99
US6602806B1Aug 5, 2003
Thermal CVD process for depositing a low dielectric constant carbon-doped silicon oxide film
APPLIED MATERIALS INC549 citations98
US6486061B1Nov 26, 2002
Post-deposition treatment to enhance properties of Si-O-C low K films
APPLIED MATERIALS INC83 citations98
US6858923B2Feb 22, 2005
Post-deposition treatment to enhance properties of Si-O-C low films
APPLIED MATERIALS INC17 citations92
US6528116B1Mar 4, 2003
Lid cooling mechanism and method for optimized deposition of low-k dielectric using tri methylsilane-ozone based processes
APPLIED MATERIALS INC15 citations90
US6899763B2May 31, 2005
Lid cooling mechanism and method for optimized deposition of low-K dielectric using TR methylsilane-ozone based processes
APPLIED MATERIALS INC10 citations71