Inventor · disambiguated record
Keith A. Edwards
Also filed as: EDWARDS KEITH · EDWARDS KEITH A
5 granted patents·108 citations·filing 1999–2007
82Inventor score
Top patents by PatentIndex Score
5 records- 0191US6748280B1Semiconductor run-to-run control system with state and model parameter estimationBROOKS AUTOMATION INC·Filed 2002·Granted Jun 8, 2004·66 cites·37 claims
- 0272US6725098B2Semiconductor run-to-run control system with missing and out-of-order measurement handlingBROOKS AUTOMATION INC·Filed 2001·Granted Apr 20, 2004·14 cites·29 claims
- 0358US8386111B2Automatic vehicle guidance protection systemADVANCED TRANSP SYSTEMS LTD·Filed 2007·Granted Feb 26, 2013·5 cites·11 claims
- 0457US6179688B1Method and apparatus for detecting the endpoint of a chemical-mechanical polishing operationADVANCED MICRO DEVICES INC·Filed 1999·Granted Jan 30, 2001·18 cites·52 claims
- 0552US6572443B1Method and apparatus for detecting a process endpointADVANCED MICRO DEVICES INC·Filed 2000·Granted Jun 3, 2003·5 cites·43 claims
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