Inventor
OOTANI MICHITAKA
JP29 patents
⚠️ This page may combine multiple inventors who share the name “OOTANI MICHITAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHINETSU CHEMICAL CO
14 patentsUS7354693B2Apr 8, 2008
Polymer, resist protective coating material, and patterning process
SHINETSU CHEMICAL CO54 citations96
US6710148B2Mar 23, 2004
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO20 citations93
US6511787B2Jan 28, 2003
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO25 citations93
US6872514B2Mar 29, 2005
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO13 citations84
US6582880B2Jun 24, 2003
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO14 citations84
US6864037B2Mar 8, 2005
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO11 citations74
US6824955B2Nov 30, 2004
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO7 citations74
US7666967B2Feb 23, 2010
Ester compound, polymer, resist composition, and patterning process
SHINETSU CHEMICAL CO5 citations63
US7569323B2Aug 4, 2009
Resist protective coating material and patterning process
SHINETSU CHEMICAL CO4 citations63
US7378218B2May 27, 2008
Polymer, resist composition and patterning process
SHINETSU CHEMICAL CO3 citations63
US6861197B2Mar 1, 2005
Polymers, resist compositions and patterning process
SHINETSU CHEMICAL CO6 citations63
US6790586B2Sep 14, 2004
Resist compositions and patterning process
SHINETSU CHEMICAL CO4 citations63
US6855477B2Feb 15, 2005
Chemically amplified resist compositions and patterning process
SHINETSU CHEMICAL CO1 citations52
US6603037B2Aug 5, 2003
Ester compounds
SHINETSU CHEMICAL CO0 citations52
CENTRAL GLASS CO LTD
11 patentsUS7402626B2Jul 22, 2008
Top coat composition
CENTRAL GLASS CO LTD31 citations92
US7276623B2Oct 2, 2007
Polymerizable ester compounds
CENTRAL GLASS CO LTD10 citations84
US6916592B2Jul 12, 2005
Esters, polymers, resist compositions and patterning process
CENTRAL GLASS CO LTD16 citations84
US6723485B1Apr 20, 2004
Positive resist composition and process for forming resist pattern using same
CENTRAL GLASS CO LTD13 citations84
US7005228B2Feb 28, 2006
Polymers, resist compositions and patterning process
CENTRAL GLASS CO LTD2 citations63
US6946235B2Sep 20, 2005
Polymers, resist compositions and patterning process
CENTRAL GLASS CO LTD4 citations63
US6933095B2Aug 23, 2005
Polymers, resist compositions and patterning process
CENTRAL GLASS CO LTD3 citations63
US6414167B1Jul 2, 2002
Octafluorotricyclodecane derivatives and processes for producing same
CENTRAL GLASS CO LTD4 citations63
US7736835B2Jun 15, 2010
Fluorine-containing cyclic compound, fluorine-containing polymer compound, resist material using same and method for forming pattern
CENTRAL GLASS CO LTD0 citations52
US7169869B2Jan 30, 2007
Polymers, resist compositions and patterning process
CENTRAL GLASS CO LTD1 citations52
US11987772B2May 21, 2024
Solvent composition
CENTRAL GLASS CO LTD0 citations49