Inventor
KOHAMA KYOUJI
JP3 patents
Patents
3 patentsUS6536452B1Mar 25, 2003
Processing apparatus and processing method
TOKYO ELECTRON LTD28 citations90
US6578592B1Jun 17, 2003
Processing apparatus with horizontally movable enclosing element
TOKYO ELECTRON LTD4 citations61
US6895979B2May 24, 2005
Processing apparatus and processing method
TOKYO ELECTRON LTD2 citations60