Inventor
VREUGDEWATER PATRICIA
NL9 patents
Patents
9 patentsUS7145269B2Dec 5, 2006
Lithographic apparatus, Lorentz actuator, and device manufacturing method
ASML NETHERLANDS BV30 citations92
US7245047B2Jul 17, 2007
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV14 citations84
US7742149B2Jun 22, 2010
Stage system and lithographic apparatus comprising such a stage system
ASML NETHERLANDS BV15 citations82
US7095485B2Aug 22, 2006
Lithographic linear motor, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV10 citations73
US7005823B2Feb 28, 2006
Positioning system and positioning method
ASML NETHERLANDS BV9 citations69
US7224429B2May 29, 2007
Lithographic apparatus, device manufacturing method and positioning system
ASML NETHERLANDS BV3 citations62
US7161267B2Jan 9, 2007
Displacement apparatus, litographic apparatus, device manufacturing method, and device manufactured thereby
ASML NETHERLANDS BV6 citations62
US7088428B2Aug 8, 2006
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations62
US7079226B2Jul 18, 2006
Lithographic actuator mechanism, lithographic apparatus, and device manufacturing method
ASML NETHERLANDS BV2 citations62