Inventor

DRILL CHARLES FRANKLIN

US8 patents

⚠️ This page may combine multiple inventors who share the name “DRILL CHARLES FRANKLIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

VLSI TECHNOLOGY INC

4 patents

US6241587B1Jun 5, 2001

System for dislodging by-product agglomerations from a polishing pad of a chemical mechanical polishing machine

VLSI TECHNOLOGY INC74 citations95

US6190236B1Feb 20, 2001

Method and system for vacuum removal of chemical mechanical polishing by-products

VLSI TECHNOLOGY INC80 citations94

US5952241ASep 14, 1999

Method and apparatus for improving alignment for metal masking in conjuction with oxide and tungsten CMP

VLSI TECHNOLOGY INC24 citations89

US6274940B1Aug 14, 2001

Semiconductor wafer, a chemical-mechanical alignment mark, and an apparatus for improving alignment for metal masking in conjunction with oxide and tungsten CMP

VLSI TECHNOLOGY INC10 citations70

VSLI TECHNOLOGY INC

2 patents

US6139428AOct 31, 2000

Conditioning ring for use in a chemical mechanical polishing machine

VSLI TECHNOLOGY INC60 citations94

US6347979B1Feb 19, 2002

Slurry dispensing carrier ring

VSLI TECHNOLOGY INC19 citations82

KONINKL PHILIPS ELECTRONICS NV

2 patents

US6572439B1Jun 3, 2003

Customized polishing pad for selective process performance during chemical mechanical polishing

KONINKL PHILIPS ELECTRONICS NV15 citations83

US7018282B1Mar 28, 2006

Customized polishing pad for selective process performance during chemical mechanical polishing

KONINKL PHILIPS ELECTRONICS NV3 citations62