Inventor
BOEGLIN HERMAN J
US6 patents
⚠️ This page may combine multiple inventors who share the name “BOEGLIN HERMAN J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
OLIN CORP
4 patentsUS5551309ASep 3, 1996
Computer-controlled chemical dispensing with alternative operating modes
OLIN CORP80 citations93
US5061514AOct 29, 1991
Chemical vapor deposition (CVD) process for plasma depositing silicon carbide films onto a substrate
OLIN CORP25 citations90
US5053255AOct 1, 1991
Chemical vapor deposition (CVD) process for the thermally depositing silicon carbide films onto a substrate
OLIN CORP15 citations71
US5721176AFeb 24, 1998
Use of oxalyl chloride to form chloride-doped silicon dioxide films of silicon substrates
OLIN CORP4 citations59