Inventor
ANGEL GORDON C
US5 patents
Patents
5 patentsUS7655922B2Feb 2, 2010
Techniques for confining electrons in an ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT9 citations82
US7279687B2Oct 9, 2007
Technique for implementing a variable aperture lens in an ion implanter
VARIAN SEMICONDUCTOR EQUIPMENT11 citations82
US7109499B2Sep 19, 2006
Apparatus and methods for two-dimensional ion beam profiling
VARIAN SEMICONDUCTOR EQUIPMENT14 citations82
US7005657B1Feb 28, 2006
Wafer-scanning ion implanter having fast beam deflection apparatus for beam glitch recovery
VARIAN SEMICONDUCTOR EQUIPMENT16 citations82
US7250617B2Jul 31, 2007
Ion beam neutral detection
VARIAN SEMICONDUCTOR EQUIPMENT7 citations73