Inventor
WONG ALFRED K
US17 patents
⚠️ This page may combine multiple inventors who share the name “WONG ALFRED K”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
11 patentsUS6578190B2Jun 10, 2003
Process window based optical proximity correction of lithographic images
IBM289 citations99
US6553559B2Apr 22, 2003
Method to determine optical proximity correction and assist feature rules which account for variations in mask dimensions
IBM296 citations98
US6338922B1Jan 15, 2002
Optimized alternating phase shifted mask design
IBM123 citations98
US6057063AMay 2, 2000
Phase shifted mask design system, phase shifted mask and VLSI circuit devices manufactured therewith
IBM171 citations98
US6223139B1Apr 24, 2001
Kernel-based fast aerial image computation for a large scale design of integrated circuit patterns
IBM124 citations97
US5932377AAug 3, 1999
Exact transmission balanced alternating phase-shifting mask for photolithography
IBM86 citations96
US6602728B1Aug 5, 2003
Method for generating a proximity model based on proximity rules
IBM73 citations95
US6541166B2Apr 1, 2003
Method and apparatus for lithographically printing tightly nested and isolated device features using multiple mask exposures
IBM19 citations92
US6327033B1Dec 4, 2001
Detection of phase defects on photomasks by differential imaging
IBM37 citations92
US6511791B1Jan 28, 2003
Multiple exposure process for formation of dense rectangular arrays
IBM19 citations84
US6596442B1Jul 22, 2003
Asymmetric halftone biasing for sub-grid pattern adjustment
IBM6 citations62